DTG-LV
Low Voltage Precision Waveform Generator

• Target Process TSV / ALE / ALD
  (Conductor Etch)
• Vpk-Pk 2 kV
• Output Current 5 Arms
• Pulse Capability CW or Pulse mode
• Frequency 400 kHz, Factory Adjustable
• Input Power
  208 VAC  3-phase

  5 kVA

DTG-MV
Mid Voltage Optimized Waveform Generator

• Target Process DRAM Cap / STI / VCT
  (Conductor Etch)
• Vpk-Pk 5 kV
• Output Current 10 Arms
• Pulse Capability CW or Pulse mode
• Frequency 400 kHz, Factory Adjustable
• Input Power
  208 VAC  3-phase

  15 kVA

DTG-HV
High Voltage Advanced Waveform Generator

• Target Process Channel Hole
  (Dielectric Etch)
• Vpk-Pk < 20 kV
• Output Current 15 Arms
• Pulse Capability CW or Pulse mode
• Frequency 400 kHz, Factory Adjustable
• Input Power
  440~480 VAC  3-phase

  60 kVA